Process for preparing disilane by using molecular sieves
Title: | Process for preparing disilane by using molecular sieves |
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Patent Number: | 5,089,244 |
Publication Date: | February 18, 1992 |
Appl. No: | 07/587,125 |
Application Filed: | September 24, 1990 |
Abstract: | Process for preparing disilane, wherein a raw gas including monosilane, disilane, trisilane and impurities such as phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, undergoes a step of separation by distillation for the substantial elimination of the other compounds of silicon, except disiloxane, and the substantial elimination of phosphine, hydrogen sulfide and arsine impurities, wherein a final purification of the disilane takes place by selective adsorption on molecular sieves, in which one is a sieve of type 3 A and which is used for the elimination of the siloxanes and hydrogen sulfide and the other is a sieve of type 4 A for the elimination of phosphine and arsine. |
Inventors: | Parent, Jean-Claude (Garches, FRX); Renaudin, Marie-Helene (Paris, FRX) |
Assignees: | L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude (Paris, FRX) |
Claim: | We claim |
Claim: | 1. A process for preparing substantially purified disilane from a raw gas including monosilane, disilane, trisilane and impurities of phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, comprising: separating by distillation to substantially eliminate compounds of silicon, except disiloxane, and substantially eliminating impurities comprising phosphine, hydrogen sulfide and arsine by selective adsorption on molecular sieves, wherein one sieve is type 3 A and eliminates siloxanes and hydrogen sulfide and another sieve is type 4 A and eliminates phosphine and arsine to provide a substantially purified disilane. |
Claim: | 2. The process according to claim 1, wherein molecular sieve 4 A for elimination of phosphine and arsine is modified by substituting cadmium ions for sodium ions. |
Claim: | 3. The process according to claim 1, wherein the siloxanes and hydrogen sulfide are first eliminated on a molecular sieve 3 A, and phosphine and arsine are eliminated on molecular sieve 4 A. |
Current U.S. Class: | 423/347; 55/75 |
Current International Class: | C01B 3304 |
Patent References Cited: | 3982912 September 1976 Yatsurugi et al. 4554141 November 1985 Scull et al. 4976944 December 1990 Pacauro et al. |
Other References: | Ruthven, "Zeolites as Selective Adsorbents", Chemical Engineering Progress, Feb. 1988, pp. 42-50. Chemical Abstracts, vol. 66, No. 8, Feb. 20, 1967, p. 3102, Abrege No. 3246w, Columbus, Ohio, U.S.A.; V. Milenko et al.: Ion-Exchange Equilibriums in Molecular Sieve 4A" & Trans. Faraday Soc. 1966, vol. 62, No. 12 pp. 3479-3488. |
Primary Examiner: | Chaudhuri, Olik |
Assistant Examiner: | Horton, Ken |
Attorney, Agent or Firm: | Browdy and Neimark |
Accession Number: | edspgr.05089244 |
Database: | USPTO Patent Grants |
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Items | – Name: Title Label: Title Group: Ti Data: Process for preparing disilane by using molecular sieves – Name: DocumentID Label: Patent Number Group: Patent Data: 5,089,244 – Name: DateEntry Label: Publication Date Group: Patent Data: February 18, 1992 – Name: DocumentID Label: Appl. No Group: Patent Data: 07/587,125 – Name: DateFiled Label: Application Filed Group: Patent Data: September 24, 1990 – Name: Abstract Label: Abstract Group: Ab Data: Process for preparing disilane, wherein a raw gas including monosilane, disilane, trisilane and impurities such as phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, undergoes a step of separation by distillation for the substantial elimination of the other compounds of silicon, except disiloxane, and the substantial elimination of phosphine, hydrogen sulfide and arsine impurities, wherein a final purification of the disilane takes place by selective adsorption on molecular sieves, in which one is a sieve of type 3 A and which is used for the elimination of the siloxanes and hydrogen sulfide and the other is a sieve of type 4 A for the elimination of phosphine and arsine. – Name: Author Label: Inventors Group: Patent Data: <searchLink fieldCode="ZA" term="%22Parent%2C+Jean-Claude%22">Parent, Jean-Claude</searchLink> (Garches, FRX); <searchLink fieldCode="ZA" term="%22Renaudin%2C+Marie-Helene%22">Renaudin, Marie-Helene</searchLink> (Paris, FRX) – Name: OtherAuthors Label: Assignees Group: Patent Data: <searchLink fieldCode="ZS" term="%22L'Air+Liquide%2C+Societe+Anonyme+pour+l'Etude+et+l'Exploitation+des+Procedes+Georges+Claude%22">L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude</searchLink> (Paris, FRX) – Name: Comment Label: Claim Group: Patent Data: We claim – Name: Comment Label: Claim Group: Patent Data: 1. A process for preparing substantially purified disilane from a raw gas including monosilane, disilane, trisilane and impurities of phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, comprising: separating by distillation to substantially eliminate compounds of silicon, except disiloxane, and substantially eliminating impurities comprising phosphine, hydrogen sulfide and arsine by selective adsorption on molecular sieves, wherein one sieve is type 3 A and eliminates siloxanes and hydrogen sulfide and another sieve is type 4 A and eliminates phosphine and arsine to provide a substantially purified disilane. – Name: Comment Label: Claim Group: Patent Data: 2. The process according to claim 1, wherein molecular sieve 4 A for elimination of phosphine and arsine is modified by substituting cadmium ions for sodium ions. – Name: Comment Label: Claim Group: Patent Data: 3. The process according to claim 1, wherein the siloxanes and hydrogen sulfide are first eliminated on a molecular sieve 3 A, and phosphine and arsine are eliminated on molecular sieve 4 A. – Name: CodeClass Label: Current U.S. Class Group: Patent Data: 423/347; 55/75 – Name: CodeClass Label: Current International Class Group: Patent Data: C01B 3304 – Name: Ref Label: Patent References Cited Group: Patent Data: <searchLink fieldCode="RF" term="%223982912%22">3982912</searchLink> September 1976 Yatsurugi et al.<br /><searchLink fieldCode="RF" term="%224554141%22">4554141</searchLink> November 1985 Scull et al.<br /><searchLink fieldCode="RF" term="%224976944%22">4976944</searchLink> December 1990 Pacauro et al. – Name: Ref Label: Other References Group: Patent Data: Ruthven, "Zeolites as Selective Adsorbents", Chemical Engineering Progress, Feb. 1988, pp. 42-50.<br />Chemical Abstracts, vol. 66, No. 8, Feb. 20, 1967, p. 3102, Abrege No. 3246w, Columbus, Ohio, U.S.A.; V. Milenko et al.: Ion-Exchange Equilibriums in Molecular Sieve 4A" & Trans. Faraday Soc. 1966, vol. 62, No. 12 pp. 3479-3488. – Name: AuthorEditor Label: Primary Examiner Group: Patent Data: <searchLink fieldCode="ZE" term="%22Chaudhuri%2C+Olik%22">Chaudhuri, Olik</searchLink> – Name: AuthorEditor Label: Assistant Examiner Group: Patent Data: <searchLink fieldCode="ZE" term="%22Horton%2C+Ken%22">Horton, Ken</searchLink> – Name: AuthorCorporate Label: Attorney, Agent or Firm Group: Patent Data: <searchLink fieldCode="ZG" term="%22Browdy+and+Neimark%22">Browdy and Neimark</searchLink> – Name: AN Label: Accession Number Group: ID Data: edspgr.05089244 |
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RecordInfo | BibRecord: BibEntity: Languages: – Text: English Titles: – TitleFull: Process for preparing disilane by using molecular sieves Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Parent, Jean-Claude – PersonEntity: Name: NameFull: Renaudin, Marie-Helene IsPartOfRelationships: – BibEntity: Dates: – D: 18 M: 02 Text: February 18, 1992 Type: published Y: 1992 |
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