Process for preparing disilane by using molecular sieves
| Title: | Process for preparing disilane by using molecular sieves |
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| Patent Number: | 5,089,244 |
| Publication Date: | February 18, 1992 |
| Appl. No: | 07/587,125 |
| Application Filed: | September 24, 1990 |
| Abstract: | Process for preparing disilane, wherein a raw gas including monosilane, disilane, trisilane and impurities such as phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, undergoes a step of separation by distillation for the substantial elimination of the other compounds of silicon, except disiloxane, and the substantial elimination of phosphine, hydrogen sulfide and arsine impurities, wherein a final purification of the disilane takes place by selective adsorption on molecular sieves, in which one is a sieve of type 3 A and which is used for the elimination of the siloxanes and hydrogen sulfide and the other is a sieve of type 4 A for the elimination of phosphine and arsine. |
| Inventors: | Parent, Jean-Claude (Garches, FRX); Renaudin, Marie-Helene (Paris, FRX) |
| Assignees: | L'Air Liquide, Societe Anonyme pour l'Etude et l'Exploitation des Procedes Georges Claude (Paris, FRX) |
| Claim: | We claim |
| Claim: | 1. A process for preparing substantially purified disilane from a raw gas including monosilane, disilane, trisilane and impurities of phosphine, hydrogen sulfide, arsine, disiloxane and higher siloxanes, comprising: separating by distillation to substantially eliminate compounds of silicon, except disiloxane, and substantially eliminating impurities comprising phosphine, hydrogen sulfide and arsine by selective adsorption on molecular sieves, wherein one sieve is type 3 A and eliminates siloxanes and hydrogen sulfide and another sieve is type 4 A and eliminates phosphine and arsine to provide a substantially purified disilane. |
| Claim: | 2. The process according to claim 1, wherein molecular sieve 4 A for elimination of phosphine and arsine is modified by substituting cadmium ions for sodium ions. |
| Claim: | 3. The process according to claim 1, wherein the siloxanes and hydrogen sulfide are first eliminated on a molecular sieve 3 A, and phosphine and arsine are eliminated on molecular sieve 4 A. |
| Current U.S. Class: | 423/347; 55/75 |
| Current International Class: | C01B 3304 |
| Patent References Cited: | 3982912 September 1976 Yatsurugi et al. 4554141 November 1985 Scull et al. 4976944 December 1990 Pacauro et al. |
| Other References: | Ruthven, "Zeolites as Selective Adsorbents", Chemical Engineering Progress, Feb. 1988, pp. 42-50. Chemical Abstracts, vol. 66, No. 8, Feb. 20, 1967, p. 3102, Abrege No. 3246w, Columbus, Ohio, U.S.A.; V. Milenko et al.: Ion-Exchange Equilibriums in Molecular Sieve 4A" & Trans. Faraday Soc. 1966, vol. 62, No. 12 pp. 3479-3488. |
| Primary Examiner: | Chaudhuri, Olik |
| Assistant Examiner: | Horton, Ken |
| Attorney, Agent or Firm: | Browdy and Neimark |
| Accession Number: | edspgr.05089244 |
| Database: | USPTO Patent Grants |
| Language: | English |
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