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Thin-Film Processing Technologies of Piezoelectric Materials for IoT/IoE Applications

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Title: Thin-Film Processing Technologies of Piezoelectric Materials for IoT/IoE Applications
Authors: Kobayashi, Hiroki, Matsuoka, Kouhei, Tsuyuki, Tatsurou, Suzuki, Akiyoshi, Kimura, Isao, Jinbo, Takehito, Suu, Koukou
Source: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :550-553 Jan, 2020
Relation: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
Database: IEEE Xplore Digital Library
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  Data: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :550-553 Jan, 2020
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  Data: 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1109/MEMS46641.2020.9056215
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        PageCount: 4
        StartPage: 550
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            NameFull: Kobayashi, Hiroki
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            NameFull: Matsuoka, Kouhei
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            NameFull: Tsuyuki, Tatsurou
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            NameFull: Suzuki, Akiyoshi
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            NameFull: Kimura, Isao
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            NameFull: Jinbo, Takehito
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            NameFull: Suu, Koukou
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          Dates:
            – D: 01
              M: 01
              Type: published
              Y: 2020
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