Bibliographic Details
| Title: |
Thin-Film Processing Technologies of Piezoelectric Materials for IoT/IoE Applications |
| Authors: |
Kobayashi, Hiroki, Matsuoka, Kouhei, Tsuyuki, Tatsurou, Suzuki, Akiyoshi, Kimura, Isao, Jinbo, Takehito, Suu, Koukou |
| Source: |
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2020 IEEE 33rd International Conference on. :550-553 Jan, 2020 |
| Relation: |
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |
