Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments
| Title: | Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments |
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| Authors: | Babaei Gavan, Khashayar, van der Heijden, Joost, van der Drift, Emile, van der Zant, Herre |
| Source: | 2009 IEEE Sensors Sensors, 2009 IEEE. :1836-1839 Oct, 2009 |
| Relation: | 2009 IEEE Sensors |
| Database: | IEEE Xplore Digital Library |
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