Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments
| Title: | Resonance frequency behavior of silicon nitride cantilevers as a function of pressure in different gas environments |
|---|---|
| Authors: | Babaei Gavan, Khashayar, van der Heijden, Joost, van der Drift, Emile, van der Zant, Herre |
| Source: | 2009 IEEE Sensors Sensors, 2009 IEEE. :1836-1839 Oct, 2009 |
| Relation: | 2009 IEEE Sensors |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781424445486 9781424453351 |
|---|---|
| ISSN: | 19300395 |
| DOI: | 10.1109/ICSENS.2009.5398423 |
| Published in: | 2009 IEEE Sensors, Sensors, 2009 IEEE |