Integrated Stress and Process Calibration in Strained-Si Devices
| Title: | Integrated Stress and Process Calibration in Strained-Si Devices |
|---|---|
| Authors: | Yu, T.-H., Tu, K.-C., Sheu, Y.-M., Diaz, C. H. |
| Source: | 2009 International Conference on Simulation of Semiconductor Processes and Devices Simulation of Semiconductor Processes and Devices, 2009. SISPAD '09. International Conference on. :1-4 Sep, 2009 |
| Relation: | 2009 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) |
| Database: | IEEE Xplore Digital Library |
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