Integrated Stress and Process Calibration in Strained-Si Devices
| Title: | Integrated Stress and Process Calibration in Strained-Si Devices |
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| Authors: | Yu, T.-H., Tu, K.-C., Sheu, Y.-M., Diaz, C. H. |
| Source: | 2009 International Conference on Simulation of Semiconductor Processes and Devices Simulation of Semiconductor Processes and Devices, 2009. SISPAD '09. International Conference on. :1-4 Sep, 2009 |
| Relation: | 2009 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781424439492 |
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| ISSN: | 19461569 19461577 |
| DOI: | 10.1109/SISPAD.2009.5290194 |
| Published in: | 2009 International Conference on Simulation of Semiconductor Processes and Devices, Simulation of Semiconductor Processes and Devices, 2009. SISPAD '09. International Conference on |