Effect of Fluorine Implant Energy on the Performance of P+/N-Junction, Poly-Si Resistor, and PMOS
| Title: | Effect of Fluorine Implant Energy on the Performance of P+/N-Junction, Poly-Si Resistor, and PMOS |
|---|---|
| Authors: | Link, Lee Sai, Mohamed, Mohamed Fauzi Packeer, Lik, Tan Chan |
| Source: | 2024 IEEE 40th International Electronics Manufacturing Technology (IEMT) Electronics Manufacturing Technology (IEMT),2024 IEEE 40th International. :1-4 Oct, 2024 |
| Relation: | 2024 IEEE 40th International Electronics Manufacturing Technology (IEMT) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9798350388824 |
|---|---|
| DOI: | 10.1109/IEMT61324.2024.10875202 |
| Published in: | 2024 IEEE 40th International Electronics Manufacturing Technology (IEMT), Electronics Manufacturing Technology (IEMT),2024 IEEE 40th International |