Pulsed power modulators for surface treatment by plasma immersion ion implantation

Bibliographic Details
Title: Pulsed power modulators for surface treatment by plasma immersion ion implantation
Authors: Rossi, J. O., Ueda, M., Barroso, J. J.
Source: Brazilian Journal of Physics. December 2004 34(4b)
Publisher Information: Sociedade Brasileira de FĂ­sica, 2004.
Publication Year: 2004
More Details: The treatment of surfaces by plasma immersion ion implantation requires pulsed power modulators to provide negative high voltage pulses. To achieve this requirement, we have developed three basic circuit configurations in our laboratory: pulse forming network (PFN), hard-tube pulser (HT) and Blumlein line. In this paper we discuss these three types of circuit topologies.As experimental results, first we present the voltage/current characteristic waveforms of PFN and HT pulsers in the PIII treatment of different materials (aluminum, silicon and stainless steel) as well we describe the surface characterization of the materials thereof treated.And finally,we show recent high voltage tests of a high voltage Blumlein pulser (150kV/300A/1mus) to be used in surface treatments of polymers and aluminum alloys.
Document Type: article
File Description: text/html
Language: English
ISSN: 0103-9733
DOI: 10.1590/S0103-97332004000800011
Access URL: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332004000800011
Rights: info:eu-repo/semantics/openAccess
Accession Number: edssci.S0103.97332004000800011
Database: SciELO
More Details
ISSN:01039733
DOI:10.1590/S0103-97332004000800011
Published in:Brazilian Journal of Physics
Language:English