Slit width adjusting device and microscope laser processing apparatus
| Title: | Slit width adjusting device and microscope laser processing apparatus |
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| Patent Number: | 8,680,428 |
| Publication Date: | March 25, 2014 |
| Appl. No: | 12/453920 |
| Application Filed: | May 27, 2009 |
| Abstract: | Disclosed is a slit width adjusting device comprising: a pair of slit members parallel to each other, which is moved to approach each other or to be separated from each other to adjust a slit width; a driving section to move the pair of slit members; an absolute position original point detection section to detect an arbitrary absolute position of the slit members as an original point; and an adjustment section to adjust the slit width, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value corresponding to the displacement amount, are corresponding to each other; and a drive control unit to extract the drive instruction value corresponding to a specified slit width, to drive the driving section according to the extracted drive instruction value. |
| Inventors: | Asano, Hidemitsu (Kawasaki, JP); Uwada, Makoto (Kawasaki, JP); Kaieda, Makoto (Miyazaki, JP) |
| Assignees: | Mitutoyo Corporation (Kawasaki, JP) |
| Claim: | 1. A slit width adjusting device comprising: a pair of slit members which is parallel to each other, and which is moved so as to approach each other or to be separated from each other in order to adjust a slit width of the pair of slit members; a driving section to move the pair of slit members in a direction so as to approach each other or in a direction so as to be separated from each other; an absolute position original point detection section to detect an arbitrary absolute position of at least one of the pair of slit members as an original point, the absolute position original point detection section including: a main body section disposed in a fixed position with respect to the driving section, the main body section including a fixed scale disposed in the main body section, and a moving unit connected to one end of a spindle, a longitudinal axis of the spindle being oriented in a direction of movement of the slit members, the other end of the spindle moving integrally with movement of the at least one of the pair of slit members driven by the driving section, the arbitrary absolute position of the at least one of the pair of slit members being detected as the original point by comparing a position of the moving unit with respect to the fixed scale; and an adjustment section to adjust the slit width by controlling a driving of the driving section, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value of the driving section corresponding to the displacement amount of the slit width from the original point, are corresponding to each other; and a drive control unit to instruct the storage unit to extract the drive instruction value of the driving section corresponding to a specified slit width, so as to drive the driving section according to the extracted drive instruction value. |
| Claim: | 2. The slit width adjusting device according to claim 1 , wherein the absolute position original point detection section is a photoelectric absolute position detection sensor. |
| Claim: | 3. The slit width adjusting device according to claim 1 , wherein the driving section comprises a stepping motor to rotate according to a predetermined pulse number applied to the stepping motor, and wherein the drive instruction value is the pulse number applied to the stepping motor. |
| Claim: | 4. The slit width adjusting device according to claim 1 , further comprising: a pickup section to pick up a slit image of a slit formed by the pair of slit members; a calculation section to calculate the slit width from the slit image picked up by the pickup section; a production section to produce the slit width table based on (i) the slit width calculated by the calculation section and (ii) the drive instruction value of the driving section corresponding to the calculated slit width, so as to instruct the storage unit to store the produced slit width table. |
| Claim: | 5. A microscope laser processing apparatus to emit a laser light so as to correct an examination object, comprising a slit width adjusting device including: a pair of slit members which is parallel to each other, and which is moved so as to approach each other or to be separated from each other in order to adjust a slit width of the pair of slit members, the pair of slit members being disposed in a light path of the emitted laser light; a driving section to move the pair of slit members in a direction so as to approach each other or in a direction so as to be separated from each other; an absolute position original point detection section to detect an arbitrary absolute position of at least one of the pair of slit members as an original point, the absolute position original point detection section including: a main body section disposed in a fixed position with respect to the driving section, the main body section including a fixed scale disposed in the main body section, and a moving unit connected to one end of a spindle, a longitudinal axis of the spindle being oriented in a direction of movement of the slit members, the other end of the spindle moving integrally with movement of the at least one of the pair of slit members driven by the driving section, the arbitrary absolute position of the at least one of the pair of slit members being detected as the original point by comparing a position of the moving unit with respect to the fixed scale; and an adjustment section to adjust the slit width by controlling a driving of the driving section, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value of the driving section corresponding to the displacement amount of the slit width from the original point, are corresponding to each other; and a drive control unit to instruct the storage unit to extract the drive instruction value of the driving section corresponding to a specified slit width, so as to drive the driving section according to the extracted drive instruction value. |
| Current U.S. Class: | 2191/216 |
| Patent References Cited: | 5508838 April 1996 Shimizu et al. 6130403 October 2000 Wakabayashi 7170595 January 2007 Smith et al. 2006/0144828 July 2006 Fukumitsu et al. 10090008 April 1998 A-2001-208987 August 2001 A-2005-292532 October 2005 A-2007-047657 February 2007 2001-0043177 May 2001 |
| Other References: | Machine Translation of JP 1009008, Apr. 2012. cited by examiner |
| Assistant Examiner: | Ward, Thomas |
| Primary Examiner: | Yuen, Henry |
| Attorney, Agent or Firm: | Oliff PLC |
| Accession Number: | edspgr.08680428 |
| Database: | USPTO Patent Grants |
| Language: | English |
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