Coordinate measuring machine
| Title: | Coordinate measuring machine |
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| Patent Number: | 8,316,553 |
| Publication Date: | November 27, 2012 |
| Appl. No: | 12/765401 |
| Application Filed: | April 22, 2010 |
| Abstract: | A coordinate measuring machine has a coordinate measuring machine body and a controller. The coordinate measuring machine body has a probe having a measurement piece and a drive mechanism for driving the probe. The probe has a drive unit for driving the measurement piece. The controller includes a first measuring unit and a second measuring unit. The first measuring unit measures a displacement of the measurement piece driven by the drive unit. The second measuring unit measures a displacement of the probe. The measurement accuracy of the second measuring unit is lower than the measurement accuracy of the first measuring unit. |
| Inventors: | Matsumiya, Sadayuki (Kawasaki, JP); Asano, Hidemitsu (Kawasaki, JP) |
| Assignees: | Mitutoyo Corporation (Kawasaki-shi, JP) |
| Claim: | 1. A coordinate measuring machine, comprising: a probe including a stylus whose tip end is provided with a measurement piece that is movable within a predetermined range; and a drive mechanism that supports and drives the probe, the coordinate measuring machine measuring an object based on a displacement of the measurement piece and a displacement of the probe, wherein the probe further includes a measurement-piece drive unit that drives the stylus in axis directions to drive the measurement piece; the coordinate measuring machine includes: a drive controller that outputs a position command for driving the stylus and the probe to the measurement-piece drive unit and the drive mechanism; a first measuring unit that measures the displacement of the measurement piece in each of the axis directions after the measurement piece is driven by the measurement-piece drive unit; a second measuring unit that measures the displacement of the probe; a measurement accuracy of the second measuring unit is lower than a measurement accuracy of the first measuring unit; and, when a measurement area of the object is divided in two areas including a small area and a large area, the drive controller outputs the position command for driving the measurement-piece drive unit when the small area is measured and outputs the position command for driving the drive unit when the large area is measured. |
| Current U.S. Class: | 33/503 |
| Patent References Cited: | 4612709 September 1986 Baisch et al. 5148600 September 1992 Chen et al. 6396589 May 2002 Ebihara 6901677 June 2005 Smith et al. 7647706 January 2010 Jordil et al. 2007/0266781 November 2007 Nemoto et al. 2009/0073419 March 2009 Gesner et al. 2009/0172962 July 2009 Aubele et al. 2010/0000307 January 2010 Igasaki et al. 0240151 October 1987 1983297 October 2008 2008-089578 April 2008 |
| Other References: | H.N. Hansen, N. Kofod, L. Dechiffre and T. Wanhelm, “Calibration and Industrial Application of Instrument for Surface Mapping Based on AFM”, CIRP Annals, Elsevier BV, NL, CH, FR LNKD-D01:10.1016/S0007-8506(07) 61563-7, vol. 51, No. 1, pp. 471-474, XP022136861. cited by other |
| Primary Examiner: | Smith, Richard A |
| Attorney, Agent or Firm: | Rankin, Hill & Clark LLP |
| Accession Number: | edspgr.08316553 |
| Database: | USPTO Patent Grants |
| Language: | English |
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