Bibliographic Details
| Title: |
IMPRINTING DEVICE AND IMPRINTING METHOD |
| Document Number: |
20090026658 |
| Publication Date: |
January 29, 2009 |
| Appl. No: |
12/279481 |
| Application Filed: |
February 07, 2007 |
| Abstract: |
After a transfer material was hardened in a situation an imprint mold which has a concave part pattern is forced against the liquid transfer material, a replica which has a convex part pattern corresponding to the concave part pattern by releasing the imprint mold. A pressurization mechanism and a vacuum pump are set, regarding depth K of the concave part pattern of the imprint mold, height k of the convex part pattern of the transfer material, effective pressure Mo while the imprint mold is forced, pressure P in the space, with satisfying: Mo/P≧k/(K−k). With this arrangement, even if air comes inside of the concave part pattern of the imprint mold and is stuffed in the inside, it is possible to have transcription with no problem. |
| Inventors: |
Hosoda, Yasuo (Saitama, JP); Imai, Tetsuya (Saitama, JP) |
| Assignees: |
PIONSER CORPORATION (TOKYO, JP) |
| Claim: |
1-11. (canceled) |
| Claim: |
12. An imprint apparatus forms a replica which has a convex part pattern corresponding to a concave part pattern, comprising: a substrate on which a transfer material is put; an imprint mold which has said concave part pattern; a forcing unit which generates forcing power to force said imprint mold against said transfer material on said substrate at effective pressure Mo [Pa]; a pressure adjusting unit which performs pressure adjusting an atmosphere at pressure P [pa] in a space in which said imprint mold and said substrate exist; and a control unit; wherein: said control unit controls said forcing unit and said pressure adjusting unit based on depth K [nm] of said concave part pattern of said imprint mold, and height k [nm] of said convex part pattern of said replica. |
| Claim: |
13. The imprint apparatus according to claim 12, wherein: said pressure adjusting unit is a decompression unit. |
| Claim: |
14. The imprint apparatus according to claim 12, wherein: said control unit controls said forcing unit and said pressure adjusting unit with satisfying: Mo/P≧k/(K−k). |
| Claim: |
15. The imprint apparatus according to claim 12, wherein: said control unit controls said forcing unit and said pressure adjusting unit, using inside area minimum forcing pressure Mmin [Pa] of a contact area between said imprint mold and said transfer material as said effective pressure Mo, with satisfying: Mmin/P≧k/(K−k). |
| Claim: |
16. The imprint apparatus according to claim 12, wherein: said control unit controls said forcing unit and said pressure adjusting unit with satisfying: 99≧Mo/P≧9. |
| Claim: |
17. The imprint apparatus according to claim 12, further comprising: an input unit which inputs depth K [nm] of said concave part pattern, height k [nm] of said convex part pattern. |
| Claim: |
18. The imprint apparatus according to claim 12, further comprising: a gas replacing unit converts said space into dry environment. |
| Claim: |
19. The imprint apparatus according to claim 12, further comprising: said control unit controls said forcing unit and said pressure adjusting unit in case height k [nm] of said convex part pattern is less than said depth K, with satisfying: 1.1k/(K−1.1k)≧Mo/P≧0.9k/(K−0.9k). |
| Claim: |
20. The imprint apparatus according to claim 19, wherein: said control unit controls said forcing unit and said pressure adjusting unit, using inside area minimum forcing pressure Mm in [Pa] of contact area between said imprint mold, and said transfer material as said effective pressure Mo, with satisfying: 1.1k/(K−1.1k)≧Mmin/P≧0.9k/(K−0.9k). |
| Claim: |
21. An imprint method for forming a replica which has a k [nm] height convex part pattern corresponding to a concave part pattern, by forcing an imprint mold which has a K [nm]depth concave part pattern against, a liquid transfer material under atmosphere pressure P [Pa], and releasing said imprint mold after said transfer material was hardened in this forced situation, wherein: said forcing and said atmosphere pressure are performed to set with satisfying: Mo/P≧k/(K−k). |
| Claim: |
22. An imprint method for forming a replica which has a k [nm] height convex part pattern corresponding to said concave part pattern, by forcing an imprint mold which has a K [nm] depth concave part pattern against a liquid transfer material under atmosphere pressure P [Pa], and releasing said imprint mold after said transfer material was hardened in this forced situation, wherein: said forcing and said atmosphere pressure are performed to set with satisfying: 1.1k/(K−1.1k)≧Mo/P≧0.9k(K−0.9k). |
| Current U.S. Class: |
264/319 |
| Current International Class: |
29; 28 |
| Accession Number: |
edspap.20090026658 |
| Database: |
USPTO Patent Applications |
