A study on eco-friendly organic antimicrobial agents to inhibit microbial growth in copper chemical mechanical polishing slurry
| Title: | A study on eco-friendly organic antimicrobial agents to inhibit microbial growth in copper chemical mechanical polishing slurry |
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| Authors: | Lee, Jaewon a, 1, Lee, Gyuyoung a, 1, Lee, Seunghwan a, 1, Choi, Hyeongseok c, Park, Kihong a, Kim, Eungchul d, Hong, Seokjun e, Kim, Taesung a, b, ⁎ |
| Source: | In Journal of Manufacturing Processes 15 March 2025 137:363-375 |
| Database: | ScienceDirect |
| ISSN: | 15266125 |
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| DOI: | 10.1016/j.jmapro.2025.01.075 |
| Published in: | Journal of Manufacturing Processes |
| Language: | English |