Effect of aluminum content on plasma resistance and contamination particle generation in yttrium aluminum oxide coatings
| Title: | Effect of aluminum content on plasma resistance and contamination particle generation in yttrium aluminum oxide coatings |
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| Authors: | So, Jongho, Choi, Eunmi, Kim, Minjoong, Lee, Dongjin, Seo, Jungpil, Maeng, Seonjeong, Chung, Chin-Wook, Yun, Ju-Young, Suh, Song-Moon |
| Source: | In Materials Science in Semiconductor Processing February 2024 170 |
| Database: | ScienceDirect |
| ISSN: | 13698001 |
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| DOI: | 10.1016/j.mssp.2023.107981 |
| Published in: | Materials Science in Semiconductor Processing |
| Language: | English |