30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film
| Title: | 30 nm X-ray focusing correlates oscillatory stress, texture and structural defect gradients across multilayered TiN-SiOx thin film |
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| Authors: | Keckes, J., Daniel, R., Todt, J., Zalesak, J., Sartory, B., Braun, S., Gluch, J., Rosenthal, M., Burghammer, M., Mitterer, C., Niese, S., Kubec, A. |
| Source: | In Acta Materialia 1 February 2018 144:862-873 |
| Database: | ScienceDirect |
| ISSN: | 13596454 |
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| DOI: | 10.1016/j.actamat.2017.11.049 |
| Published in: | Acta Materialia |
| Language: | English |