Atomic hydrogen etching of silicon-incorporated diamond-like carbon films prepared by pulsed laser deposition
| Title: | Atomic hydrogen etching of silicon-incorporated diamond-like carbon films prepared by pulsed laser deposition |
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| Authors: | Nakazawa, H., Sugita, H., Enta, Y., Suemitsu, M., Yasui, K., Itoh, T., Endoh, T., Narita, Y., Mashita, M. |
| Source: | In Diamond & Related Materials 2009 18(5):831-834 |
| Database: | ScienceDirect |
| ISSN: | 09259635 |
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| DOI: | 10.1016/j.diamond.2008.10.043 |
| Published in: | Diamond & Related Materials |
| Language: | English |