Novel AlN/ScAlN composite film SAW for achieving highly sensitive temperature sensors
| Title: | Novel AlN/ScAlN composite film SAW for achieving highly sensitive temperature sensors |
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| Authors: | Qu, Yuanhang, Chen, Xiang, Liu, Yan, Wang, Shengxiang, Gu, Xiyu, Wei, Min, Huang, Xiaoming, Liu, Zesheng, Ding, Jiaqi, Wen, Zhiwei, Cai, Yao, Guo, Shishang, Sun, Chengliang |
| Source: | In Sensors and Actuators: A. Physical 1 January 2025 381 |
| Database: | ScienceDirect |
| ISSN: | 09244247 |
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| DOI: | 10.1016/j.sna.2024.116079 |
| Published in: | Sensors and Actuators: A. Physical |
| Language: | English |