Design and realization of cap-shaped cilia MEMS vector hydrophone
| Title: | Design and realization of cap-shaped cilia MEMS vector hydrophone |
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| Authors: | Zhu, Shan, Zhang, Guojun, Shang, Zhenzhen, Yang, Xi, lv, Ting, Liang, Xiaoqi, Zhang, Xiaoyong, Chen, Peng, Zhang, Wendong |
| Source: | In Measurement October 2021 183 |
| Database: | ScienceDirect |
| ISSN: | 02632241 |
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| DOI: | 10.1016/j.measurement.2021.109818 |
| Published in: | Measurement |
| Language: | English |