Design and realization of cap-shaped cilia MEMS vector hydrophone

Bibliographic Details
Title: Design and realization of cap-shaped cilia MEMS vector hydrophone
Authors: Zhu, Shan, Zhang, Guojun, Shang, Zhenzhen, Yang, Xi, lv, Ting, Liang, Xiaoqi, Zhang, Xiaoyong, Chen, Peng, Zhang, Wendong
Source: In Measurement October 2021 183
Database: ScienceDirect
More Details
ISSN:02632241
DOI:10.1016/j.measurement.2021.109818
Published in:Measurement
Language:English