Adsorption selectivity of TiCl4 precursor on Pt surfaces for atomic layer deposition via density functional theory
| Title: | Adsorption selectivity of TiCl4 precursor on Pt surfaces for atomic layer deposition via density functional theory |
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| Authors: | Baek, Jihye 1, Nam, Kyungju 1, Park, Jung-yeon, Cha, JinHyeok ⁎ |
| Source: | In Applied Surface Science 30 December 2022 606 |
| Database: | ScienceDirect |
| ISSN: | 01694332 |
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| DOI: | 10.1016/j.apsusc.2022.154695 |
| Published in: | Applied Surface Science |
| Language: | English |