Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation: Oxide properties and impact on GaN
| Title: | Thermal oxidation of [0001] GaN in water vapor compared with dry and wet oxidation: Oxide properties and impact on GaN |
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| Authors: | Janicki, Łukasz, Korbutowicz, Ryszard, Rudziński, Mariusz, Michałowski, Paweł Piotr, Złotnik, Sebastian, Grodzicki, Miłosz, Gorantla, Sandeep, Serafińczuk, Jarosław, Hommel, Detlef, Kudrawiec, Robert |
| Source: | In Applied Surface Science 1 October 2022 598 |
| Database: | ScienceDirect |
| ISSN: | 01694332 |
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| DOI: | 10.1016/j.apsusc.2022.153872 |
| Published in: | Applied Surface Science |
| Language: | English |