Effects of radiation damage on GaN epitaxial layer arising from argon ion implantation for edge termination
| Title: | Effects of radiation damage on GaN epitaxial layer arising from argon ion implantation for edge termination |
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| Authors: | Chen, Meng-Yu, Chao, Der-Sheng, Liang, Jenq-Horng |
| Source: | In Nuclear Inst. and Methods in Physics Research, B May 2024 550 |
| Database: | ScienceDirect |
| ISSN: | 0168583X |
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| DOI: | 10.1016/j.nimb.2024.165301 |
| Published in: | Nuclear Inst. and Methods in Physics Research, B |
| Language: | English |