Micro-fabricated all optical pressure sensors
Title: | Micro-fabricated all optical pressure sensors |
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Authors: | Havreland, Andreas Spandet, Petersen, Søren Dahl, Østergaard, Christian, Reck-Nielsen, Kasper, Thomsen, Erik Vilain |
Source: | In Microelectronic Engineering 25 April 2017 174:11-15 |
Database: | ScienceDirect |
ISSN: | 01679317 |
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DOI: | 10.1016/j.mee.2016.12.010 |
Published in: | Microelectronic Engineering |
Language: | English |