Device Simulations on Novel High Channel Mobility 4H-SiC Trench MOSFETs and Their Fabrication Processes
| Title: | Device Simulations on Novel High Channel Mobility 4H-SiC Trench MOSFETs and Their Fabrication Processes |
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| Authors: | Rossmann, H.R., Bubendorf, A., Zanella, F., Marjanović, N., Schnieper, M., Meyer, E., Jung, T.A., Gobrecht, J., Minamisawa, R.A., Bartolf, H. |
| Source: | In Microelectronic Engineering 1 September 2015 145:166-169 |
| Database: | ScienceDirect |
| ISSN: | 01679317 |
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| DOI: | 10.1016/j.mee.2015.07.002 |
| Published in: | Microelectronic Engineering |
| Language: | English |