Design and simulation of mass sensors based on horizontally actuated silicon cantilevers
| Title: | Design and simulation of mass sensors based on horizontally actuated silicon cantilevers |
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| Authors: | Sánchez-Fraga, Rodolfo, Ponce-Ponce, Víctor H., Mendoza-Acevedo, Salvador, Villa-Vargas, Luis A., Estrada-Vázquez, Horacio |
| Source: | In Microelectronic Engineering 1 May 2014 119:83-88 |
| Database: | ScienceDirect |
| ISSN: | 01679317 |
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| DOI: | 10.1016/j.mee.2014.02.031 |
| Published in: | Microelectronic Engineering |
| Language: | English |