Fabrication of two-dimensional hard X-ray diffraction gratings
| Title: | Fabrication of two-dimensional hard X-ray diffraction gratings |
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| Authors: | Rutishauser, S., Bednarzik, M., Zanette, I., Weitkamp, T., Börner, M., Mohr, J., David, C. |
| Source: | In Microelectronic Engineering January 2013 101:12-16 |
| Database: | ScienceDirect |
| ISSN: | 01679317 |
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| DOI: | 10.1016/j.mee.2012.08.025 |
| Published in: | Microelectronic Engineering |
| Language: | English |