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Recent developments in deca-nanometer vertical MOSFETs

Bibliographic Details
Title: Recent developments in deca-nanometer vertical MOSFETs
Authors: Hall, S, Donaghy, D, Buiu, O, Gili, E, Uchino, T, Kunz, V.D, de Groot, C.H, Ashburn, P
Source: In Microelectronic Engineering 2004 72(1):230-235
Database: ScienceDirect
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ISSN:01679317
DOI:10.1016/j.mee.2003.12.042
Published in:Microelectronic Engineering
Language:English