Gallium phosphide conformal film growth on in-situ tri-TBP dry-cleaned InGaP/GaAs using atomic hydrogen ALD
| Title: | Gallium phosphide conformal film growth on in-situ tri-TBP dry-cleaned InGaP/GaAs using atomic hydrogen ALD |
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| Authors: | Yun, SeongUk, Lee, Ping-Che, Kuo, Cheng-Hsuan, Mcleod, Aaron J., Zhang, Zichen, Wang, Victor, Huang, James, Kashyap, Harshil, Winter, Charles H., Kummel, Andrew C. |
| Source: | In Vacuum February 2024 220 |
| Database: | ScienceDirect |
| ISSN: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2023.112806 |
| Published in: | Vacuum |
| Language: | English |