Effective reactive pulsed magnetron sputtering of aluminium oxide – Properties of films deposited utilizing automated process stabilizer
| Title: | Effective reactive pulsed magnetron sputtering of aluminium oxide – Properties of films deposited utilizing automated process stabilizer |
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| Authors: | Wiatrowski, Artur, Patela, Sergiusz, Kunicki, Piotr, Posadowski, Witold |
| Source: | In Vacuum December 2016 134:54-62 |
| Database: | ScienceDirect |
| ISSN: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2016.09.021 |
| Published in: | Vacuum |
| Language: | English |