Stabilization of sputtered AlN/sapphire templates during high temperature annealing
| Title: | Stabilization of sputtered AlN/sapphire templates during high temperature annealing |
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| Authors: | Hagedorn, S., Walde, S., Mogilatenko, A., Weyers, M., Cancellara, L., Albrecht, M., Jaeger, D. |
| Source: | In Journal of Crystal Growth 15 April 2019 512:142-146 |
| Database: | ScienceDirect |
| ISSN: | 00220248 |
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| DOI: | 10.1016/j.jcrysgro.2019.02.024 |
| Published in: | Journal of Crystal Growth |
| Language: | English |