Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging
| Title: | Oxygen and hydrogen sorption in thermally activated yttrium-based getter thin films for MEMS vacuum packaging |
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| Authors: | Kutyla, Charlotte, Lemettre, Sylvain, Bessouet, Clement, Bosseboeuf, Alain, Coste, Philippe, Sauvage, Thierry, Wendling, Olivier, Bellamy, Aurelien, Jagtap, Piyush, Escoubas, Stephanie, Guichet, Christophe, Thomas, Olivier, Moulin, Johan |
| Source: | 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2022 Symposium on. :1-4 Jul, 2022 |
| Relation: | 2022 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) |
| Database: | IEEE Xplore Digital Library |
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