Interfacial-Layer Design for Hf1-xZrxO2-Based FTJ Devices: From Atom to Array

Bibliographic Details
Title: Interfacial-Layer Design for Hf1-xZrxO2-Based FTJ Devices: From Atom to Array
Authors: Chiang, H. -L., Wang, J.-F., Lin, K. -H., Nien, C.-H., Wu, J. -J., Hsiang, K.-Y., Chuu, C. -P., Chen, Y.-W., Zhang, X. W., Liu, C. W., Wang, Tahui, Wang, C. -C., Lee, M.-H., Chang, M. -F., Chang, C.-S., Chen, T. C.
Source: 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) VLSI Technology and Circuits (VLSI Technology and Circuits), 2022 IEEE Symposium on. :361-362 Jun, 2022
Relation: 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)
Database: IEEE Xplore Digital Library