Three-Dimensional Measurements of Fundamental Plasma Parameters in Pulsed ICP Operation
| Title: | Three-Dimensional Measurements of Fundamental Plasma Parameters in Pulsed ICP Operation |
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| Authors: | Han, Jia, Pribyl, Patrick, Gekelman, Walter, Paterson, Alex |
| Source: | 2020 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2020 IEEE International Conference on. :607-607 Dec, 2020 |
| Relation: | 2020 IEEE International Conference on Plasma Science (ICOPS) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781728153070 |
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| ISSN: | 25767208 |
| DOI: | 10.1109/ICOPS37625.2020.9717675 |
| Published in: | 2020 IEEE International Conference on Plasma Science (ICOPS), Plasma Science (ICOPS), 2020 IEEE International Conference on |