A Substrate-Agnostic, Submicrometer PSAS-to-PSAS Self-Alignment Technology for Heterogeneous Integration
| Title: | A Substrate-Agnostic, Submicrometer PSAS-to-PSAS Self-Alignment Technology for Heterogeneous Integration |
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| Authors: | Gonzalez, J.L., Rajan, S.K., Brescia, J.R., Bakir, M.S. |
| Source: | IEEE Transactions on Components, Packaging and Manufacturing Technology IEEE Trans. Compon., Packag. Manufact. Technol. Components, Packaging and Manufacturing Technology, IEEE Transactions on. 11(12):2061-2068 Dec, 2021 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 21563950 21563985 |
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| DOI: | 10.1109/TCPMT.2021.3109913 |
| Published in: | IEEE Transactions on Components, Packaging and Manufacturing Technology, Components, Packaging and Manufacturing Technology, IEEE Transactions on, IEEE Trans. Compon., Packag. Manufact. Technol. |