Bibliographic Details
| Title: |
Fabrication of Tactile Display Using Arrayed SMA Film Actuator on Silicon TSV Substrate with Individually Conducting Diode |
| Authors: |
Saito, Ryo, Kimura, Yusuke, Xu, Jiale, Mineta, Takashi |
| Source: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :709-711 Jan, 2021 |
| Relation: |
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |
