Numerical Modelling of Non-Linearities in MEMS Resonators

Bibliographic Details
Title:	Numerical Modelling of Non-Linearities in MEMS Resonators
Authors:	Zega, V., Gattere, G., Koppaka, S., Alter, A., Vukasin, G.D., Frangi, A., Kenny, T.W.
Source:	Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 29(6):1443-1454 Dec, 2020
Database:	IEEE Xplore Digital Library

More Details
ISSN:	10577157 19410158
DOI:	10.1109/JMEMS.2020.3026085
Published in:	Journal of Microelectromechanical Systems, Microelectromechanical Systems, Journal of, J. Microelectromech. Syst.