Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers
| Title: | Fundamental Noise Limits and Sensitivity of Piezoelectrically Driven Magnetoelastic Cantilevers |
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| Authors: | Durdaut, P., Rubiola, E., Friedt, J., Muller, C., Spetzler, B., Kirchhof, C., Meyners, D., Quandt, E., Faupel, F., McCord, J., Knochel, R., Hoft, M. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 29(5):1347-1361 Oct, 2020 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2020.3014402 |
| Published in: | Journal of Microelectromechanical Systems, Microelectromechanical Systems, Journal of, J. Microelectromech. Syst. |