The real demonstration of High-Quality Carbon Nano-Tubes (CNTs) as the electrical connection for the potential application in a vertical 3D integrated technology

Bibliographic Details
Title: The real demonstration of High-Quality Carbon Nano-Tubes (CNTs) as the electrical connection for the potential application in a vertical 3D integrated technology
Authors: Lu, P.-Y., Li, Y.-R., Yen, C.-M., Hung, H.-T., Kao, C.-R., Pu, W.-C., Chen, C.-C. A., Lee, M.-H., Liao, M.-H.
Source: 2020 IEEE 70th Electronic Components and Technology Conference (ECTC) Electronic Components and Technology Conference (ECTC), 2020 IEEE 70th. :1573-1578 Jun, 2020
Relation: 2020 IEEE 70th Electronic Components and Technology Conference (ECTC)
Database: IEEE Xplore Digital Library