4-Point-Bending Characterization of Interfacial Adhesion Strength of Co-Zr-Ta and Co-Zr-Ta Variant Thin-Film Stacks

Bibliographic Details
Title: 4-Point-Bending Characterization of Interfacial Adhesion Strength of Co-Zr-Ta and Co-Zr-Ta Variant Thin-Film Stacks
Authors: Zhu, Xintong, Li, Xiaoxuan, Nistala, Ramesh Rao, Ali, Zishan, Peng, Lulu, Selvaraj, Lawrence, Cheng, Chor Shu, Mo, Zhi Qiang
Source: 2019 IEEE 26th International Symposium on Physical and Failure Analysis of Integrated Circuits (IPFA) Physical and Failure Analysis of Integrated Circuits (IPFA), 2019 IEEE 26th International Symposium on. :1-4 Jul, 2019
Relation: 2019 IEEE 26th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
Database: IEEE Xplore Digital Library