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Microfluidic Neural Probes with Buried Channels Fabricated Using Continuous Flow XeF2 Etching of Silicon

Bibliographic Details
Title: Microfluidic Neural Probes with Buried Channels Fabricated Using Continuous Flow XeF2 Etching of Silicon
Authors: Sharma, Kirti, Kumar, Sahana Dholipet Nagendra, Paul, Oliver, Ruther, Patrick
Source: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2019 IEEE 32nd International Conference on. :569-572 Jan, 2019
Relation: 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
Database: IEEE Xplore Digital Library
More Details
ISBN:9781728116105
9781728116099
ISSN:21601968
DOI:10.1109/MEMSYS.2019.8870673
Published in:2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS), Micro Electro Mechanical Systems (MEMS), 2019 IEEE 32nd International Conference on