3D Nanostructures by Stacking Patterned Membranes
| Title: | 3D Nanostructures by Stacking Patterned Membranes |
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| Authors: | Smith, Henry I., Fucetola, Jay J., Fucetola, Corey P., Mirica, Katherine A. |
| Source: | 2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2018 IEEE. :1-2 Oct, 2018 |
| Relation: | 2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781538676271 9781538676264 |
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| DOI: | 10.1109/S3S.2018.8640167 |
| Published in: | 2018 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2018 IEEE |