Simulation Analysis of Structure Design for Low Temperature Cu-Cu Direct Bonding in Heterogeneous Integration and Advanced Packaging Systems

Bibliographic Details
Title: Simulation Analysis of Structure Design for Low Temperature Cu-Cu Direct Bonding in Heterogeneous Integration and Advanced Packaging Systems
Authors: Pan, Yu-Ming, Yang, Yu-Tao, Chou, Tzu-Chieh, Yu, Ting-Yang, Yang, Kai-Ming, Ko, Cheng-Ta, Chen, Yu-Hua, Tseng, Tzyy-Jang, Chen, Kuan-Neng
Source: 2018 13th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2018 13th International. :111-114 Oct, 2018
Relation: 2018 13th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
Database: IEEE Xplore Digital Library