Characterization of Vapor Adsorption on the Surface of Si Spheres by Ellipsometry

Bibliographic Details
Title: Characterization of Vapor Adsorption on the Surface of Si Spheres by Ellipsometry
Authors: Fujita, Kazuaki, Kuramoto, Naoki, Mizushima, Shigeki, Fujii, Kenichi
Source: 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) Precision Electromagnetic Measurements (CPEM 2018), 2018 Conference on. :1-2 Jul, 2018
Relation: 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018)
Database: IEEE Xplore Digital Library