Characterization of Vapor Adsorption on the Surface of Si Spheres by Ellipsometry
| Title: | Characterization of Vapor Adsorption on the Surface of Si Spheres by Ellipsometry |
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| Authors: | Fujita, Kazuaki, Kuramoto, Naoki, Mizushima, Shigeki, Fujii, Kenichi |
| Source: | 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) Precision Electromagnetic Measurements (CPEM 2018), 2018 Conference on. :1-2 Jul, 2018 |
| Relation: | 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781538609743 9781538609736 |
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| ISSN: | 21600171 |
| DOI: | 10.1109/CPEM.2018.8500958 |
| Published in: | 2018 Conference on Precision Electromagnetic Measurements (CPEM 2018), Precision Electromagnetic Measurements (CPEM 2018), 2018 Conference on |