Gotz, A., Gracia, I., Cane, C., Lozano, M., & Lora-Tamayo, E. (2000). Thermo-mechanical structures for the optimisation of silicon micromachined gas sensors. ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095), Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on, Microelectronic test structures, 90-94. https://doi.org/10.1109/ICMTS.2000.844411

Gotz, A., I. Gracia, C. Cane, M. Lozano, and E. Lora-Tamayo. "Thermo-mechanical Structures for the Optimisation of Silicon Micromachined Gas Sensors." ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095), Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on, Microelectronic Test Structures 2000: 90-94. https://doi.org/10.1109/ICMTS.2000.844411.

Gotz, A., et al. "Thermo-mechanical Structures for the Optimisation of Silicon Micromachined Gas Sensors." ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095), Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on, Microelectronic Test Structures, 2000, pp. 90-94, https://doi.org/10.1109/ICMTS.2000.844411.