Bibliographic Details
| Title: |
Thermo-mechanical structures for the optimisation of silicon micromachined gas sensors |
| Authors: |
Gotz, A., Gracia, I., Cane, C., Lozano, M., Lora-Tamayo, E. |
| Source: |
ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) Microelectronic test structures Microelectronic Test Structures, 2000. ICMTS 2000. Proceedings of the 2000 International Conference on. :90-94 2000 |
| Relation: |
ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures |
| Database: |
IEEE Xplore Digital Library |
