Micro-photoluminescence imaging of dislocation generation in 0.18μm power semiconductor devices with deep trenches
| Title: | Micro-photoluminescence imaging of dislocation generation in 0.18μm power semiconductor devices with deep trenches |
|---|---|
| Authors: | Greenwood, B., Gambino, J.P., Watanabe, Y., Jastrzebski, L., Nadudvari, G., Cseh, D. T., Roszol, L., Molnar, G., Lajtos, I. |
| Source: | 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :5-9 Apr, 2018 |
| Relation: | 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: | IEEE Xplore Digital Library |
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