| Title: |
Micro-photoluminescence imaging of dislocation generation in 0.18μm power semiconductor devices with deep trenches |
| Authors: |
Greenwood, B., Gambino, J.P., Watanabe, Y., Jastrzebski, L., Nadudvari, G., Cseh, D. T., Roszol, L., Molnar, G., Lajtos, I. |
| Source: |
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2018 29th Annual. :5-9 Apr, 2018 |
| Relation: |
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: |
IEEE Xplore Digital Library |
