CoSi/sub 2/ integrated fuses on poly silicon for low voltage 0.18 /spl mu/m CMOS applications
| Title: | CoSi/sub 2/ integrated fuses on poly silicon for low voltage 0.18 /spl mu/m CMOS applications |
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| Authors: | Kalnitsky, A., Saadat, I., Bergemont, A., Francis, P. |
| Source: | International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) Electron devices Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International. :765-768 1999 |
| Relation: | International Electron Devices Meeting 1999. Technical Digest |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 0780354109 9780780354104 |
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| DOI: | 10.1109/IEDM.1999.824263 |
| Published in: | International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318), Electron Devices Meeting, 1999. IEDM '99. Technical Digest. International, Electron devices |