Todorov, S., Latona, G., Cummings, J., & Kase, M. (1999). Investigation of energy purity of Sub-10 keV B/sup +/ implants on a Varian VIISion PLUS ion implanter. 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144), Ion Implantation Technology Proceedings, 1998 International Conference on, Ion implantation technology, 1, 650-653. https://doi.org/10.1109/IIT.1999.812200

Todorov, S.S, G.B Latona, J.J Cummings, and M. Kase. "Investigation of Energy Purity of Sub-10 KeV B/sup +/ Implants on a Varian VIISion PLUS Ion Implanter." 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144), Ion Implantation Technology Proceedings, 1998 International Conference on, Ion Implantation Technology 1 (1999): 650-653. https://doi.org/10.1109/IIT.1999.812200.

Todorov, S.S, et al. "Investigation of Energy Purity of Sub-10 KeV B/sup +/ Implants on a Varian VIISion PLUS Ion Implanter." 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144), Ion Implantation Technology Proceedings, 1998 International Conference on, Ion Implantation Technology, vol. 1, 1999, pp. 650-653, https://doi.org/10.1109/IIT.1999.812200.