Bibliographic Details
| Title: |
Investigation of energy purity of Sub-10 keV B/sup +/ implants on a Varian VIISion PLUS ion implanter |
| Authors: |
Todorov, S.S., Latona, G.B., Cummings, J.J., Kase, M. |
| Source: |
1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 1:650-653 vol.1 1999 |
| Relation: |
1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 |
| Database: |
IEEE Xplore Digital Library |
